Zolix · Ambient Piezo Stages
Carrier.OB400.C Piezo Objective Scanner
Objective Z scanner; 400 um Z travel; 5 nm closed-loop resolution; 165 Hz resonant frequency at 150 g load; M25 x 0.75 objective mount.
- Travel range
- 400 μm
- Active axes
- Z
- Mass
- 350 g
- Pitch/Yaw
- ±30 µrad
Specifications
| Active axes | Z |
|---|---|
| Mass | 350 g |
| Travel range | 400 μm |
| Pitch/Yaw | ±30 µrad |
| Linearity | 0.0003 |
| Resolution(open loop) | 0.8 nm |
| Resolution(closed-loop) | 5 nm |
| Repeatability | 10 nm |
| Sensor Type | Capacitive Sensor |
| Response Time | 24 ms |
| Stiffness | 0.25 N/um |
| Resonant Frequency(no load) | 380 Hz |
| Resonant Frequency(150 g) | 165 Hz |
| Controller | MC-Archimedes.N series |