Zolix · Ambient Piezo Stages
Carrier.OB200.C Piezo Objective Scanner
Objective Z scanner; 200 um Z travel; 3 nm closed-loop resolution; 220 Hz resonant frequency at 150 g load; M25 x 0.75 objective mount.
- Travel range
- 200 μm
- Active axes
- Z
- Mass
- 270 g
- Pitch/Yaw
- ±20 µrad
Specifications
| Active axes | Z |
|---|---|
| Mass | 270 g |
| Travel range | 200 μm |
| Pitch/Yaw | ±20 µrad |
| Linearity | 0.0003 |
| Resolution(open loop) | 0.4 nm |
| Resolution(closed-loop) | 3 nm |
| Repeatability | 10 nm |
| Sensor Type | Capacitive Sensor |
| Response Time | 19 ms |
| Stiffness | 0.35 N/um |
| Resonant Frequency(no load) | 480 Hz |
| Resonant Frequency(150 g) | 220 Hz |
| Controller | MC-Archimedes.N series |