Zolix · Ambient Piezo Stages
Carrier.OB100.C Piezo Objective Scanner
Objective Z scanner; 100 um Z travel; 1 nm closed-loop resolution; 250 Hz resonant frequency at 150 g load; M25 x 0.75 objective mount.
- Travel range
- 100 μm
- Active axes
- Z
- Mass
- 270 g
- Pitch/Yaw
- ±10 µrad
Specifications
| Active axes | Z |
|---|---|
| Mass | 270 g |
| Travel range | 100 μm |
| Pitch/Yaw | ±10 µrad |
| Linearity | 0.0003 |
| Resolution(open loop) | 0.2 nm |
| Resolution(closed-loop) | 1 nm |
| Repeatability | 10 nm |
| Sensor Type | Capacitive Sensor |
| Response Time | 15 ms |
| Stiffness | 0.5 N/um |
| Resonant Frequency(no load) | 600 Hz |
| Resonant Frequency(150 g) | 250 Hz |
| Controller | MC-Archimedes.N series |