Zolix · Motorized Stages
HXP-824A Hexapod
Hexapod with ±34 mm X/Y travel, ±15 mm Z travel, ±11° θX/θY travel and ±25° θZ travel. Unidirectional repeatability ±0.5 µm (X and Y). Horizontal load capacity 20 kg; weight 7 kg.
- Travel range, X and Y
- ±34 mm
- Minimum incremental motion, X, Y and Z
- 1 µm
- Horizontal load capacity
- 20 kg
- Travel range, Z
- ±15 mm
Specifications
Mechanical
| Travel range, X and Y (mm) | ±34 |
|---|---|
| Travel range, Z (mm) | ±15 |
| Travel range, θX and θY (°) | ±11 |
| Travel range, θZ (°) | ±25 |
| Body material and finish | SUS/Aluminium alloy |
| Weight (kg) | 7 |
| Max. height (mm) | 186 |
| Min. height (mm) | 153 |
Accuracy
| Push rod resolution (µm) | 0.25 |
|---|---|
| Minimum incremental motion, X, Y and Z (µm) | 1 |
| Minimum incremental motion, θX, θY and θZ (°) | 0.001 |
| Backlash, X and Y (µm) | 3 |
| Backlash, Z (µm) | 1 |
| Backlash, θX and θY (arcsec) | 10 |
| Backlash, θZ (arcsec) | 15 |
| Unidirectional repeatability, X and Y (µm) | ±0.5 |
| Unidirectional repeatability, Z (µm) | ±0.3 |
| Unidirectional repeatability, θX and θY (arcsec) | ±2 |
| Unidirectional repeatability, θZ (arcsec) | ±2.5 |
| Max speed of push rod (mm/s) | 80 |
| Standard speed of push rod (mm/s) | 40 |
Motor & electrical
| Motor type | Step-servo motor |
|---|---|
| Operating temperature (°C) | +10 ~ +40 |
Sensors & connection
| Cable length (m) | 2 |
|---|---|
| Height at the original position (mm) | 169.7±0.1 |
Load capacity
| Horizontal load capacity (kg) | 20 |
|---|---|
| Load capacity, any direction (kg) | 2.5 |