Zolix · Motorized Stages
NXP-3NP Parallel-Flexure Coupling Platform
3-axis parallel-flexure optical coupling platform with no sliding bearings. The monolithic architecture minimizes backlash and accumulated stack error, with an integrated closed-loop piezo actuator for nanometre positioning.
- Degrees of freedom
- X / Y / Z
- Linear travel
- 4 mm on X, Y, and Z
- Crosstalk
- ≤100 µm
- Top-plate parallelism
- <100 µm
Specifications
| Degrees of freedom | X / Y / Z |
|---|---|
| Linear travel | 4 mm on X, Y, and Z |
| Crosstalk | ≤100 µm |
| Top-plate parallelism | <100 µm |
| Architecture | Parallel flexure; no guide bearings or sliding interfaces |
| Piezo travel | 19 µm typical, closed loop |
| Linear piezo resolution | 1 nm |
| Maximum load | 1 kg |
| Resonant frequency | >130 Hz (±10%) |
| Thermal stability | 1 µm/°C |